Module Information
Module Identifier
PH33710
Module Title
Science of Semiconductor Applications
Academic Year
2014/2015
Co-ordinator
Semester
Semester 2
Pre-Requisite
Other Staff
Course Delivery
| Delivery Type | Delivery length / details |
|---|---|
| Lecture | 22 lectures |
Assessment
| Assessment Type | Assessment length / details | Proportion |
|---|---|---|
| Semester Assessment | Essays written during the Semester | 70% |
| Semester Assessment | Continuous Assessment: test | 30% |
| Supplementary Assessment | 2 Hours Supplementary Assessment | 100% |
Learning Outcomes
After taking this module students should be able to:
- describe the complete route from the production of semiconductor substates and thin film structures to the production of packaged electronic devices
- critically analyze the technical issues involved (size, cost, power consumption etc.) in the production of an integrated device.
- critically analyze characterization methods for semiconductor materials and devices.
- design a simple digital circuit and layout the design.
Brief description
The Semiconductor Applications module will provide students with an understanding of the physics underlying semiconductor devices and applications and introduce them to the processing of semiconductors to produce devices.
Content
Introduction to the science of semiconductors and microelectronic technology.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
Wafer processing:
Oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
Electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Physics and chemistry of bulk semiconductor growth. Epitaxial growth of thin films.
Wafer processing:
Oxidation, insulating films; lithography (optical, x-ray, electron-beam, ion-beam); etching (wet chemical, plasma, reactive ion); dopant diffusion, ion implantation; metallisation.
Physics of electron, ion and photon interaction with matter.
Bulk and thin film characterisation techniques:
Electrical (conductivity, mobility), optical (reflectance, luminescence), compositional (spectroscopy, microscopy), structural (diffraction, scanned probe).
Statistical process control, quality control analysis:
Device electrical testing, VLSI testing.
Reading List
DV Morgan and K Board An Introduction to Semiconductor Microtechnology J Wiley Primo search I Brodie and JJ Murray Physics of Microfabrication Plenum Primo search M Jaros Physics and Applications of Semiconductor Microstructures Oxford Primo search N Weste and K Eshraghian Principles of CMOS design Primo search
Notes
This module is at CQFW Level 6